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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/16008
Record Status
Checked
Record Id
16008
Title
1 nm X-ray lithography using novel mask fabrication technique
Contributors
GJ Berry
,
JA Cairns
,
MR Davidson
,
DRG Rodley
,
J Thomson
,
ICE Turcu
,
W Shaikh
Abstract
Organisation
CCLRC
,
CLF
,
CLF-LFS
Keywords
CLF 1997-1998
Funding Information
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
Rev Sci Instrum
69 (1998): 3350.
doi:10.1063/1.1149099
1998
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