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Persistent URL http://purl.org/net/epubs/work/16657
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Record Id 16657
Title Fast, chemically amplified epoxy novolac photoresist for soft x-ray contact microscopy of living biological species
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Abstract
Organisation CCLRC , CLF , CLF-HPL
Keywords CLF 1998-1999
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Language English (EN)
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Presentation Presented at CLEO/EUROPE’98, Glasgow, UK (September 1998).