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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/18521
Record Status
Checked
Record Id
18521
Title
X-ray micro- and nanofabrication using a laser-plasma source at 1 nm wavelength
Contributors
ICE Turcu
,
RM Allot
,
CM Mann
,
C Reeves
,
IN Ross
,
N Lisi
,
BJ Maddison
,
SW Moon
,
P Prewett
,
JTM Stevenson
,
AWS Ross
,
AM Gundlach
,
B Koek
,
P Mitchell
,
P Anastasi
,
C McCoard
,
NS Kim
Abstract
Organisation
CCLRC
,
CLF
,
SSTD
Keywords
Be
,
EXCIMER
,
FIELD
,
MICROWAVE
,
NM
,
PLASMA
,
SYSTEM
,
X ray
,
structure
,
x ray lithography
Funding Information
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
J Vac Sci Technol B
15, no. 6 (1997): 2495-2502.
doi:10.1116/1.589673
1997
Presentation
Presented at 41st International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Dana Point, USA (May 1997).
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