ePubs

The open archive for STFC research publications

Full Record Details

Persistent URL http://purl.org/net/epubs/work/31352
Record Status Checked
Record Id 31352
Title A multi-technique study of titanium nitride films deposited via reactive sputter deposition
Contributors
Abstract
Organisation CCLRC , SRS , 2.3 , 8.1
Keywords
Funding Information
Related Research Object(s):
Licence Information:
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Mater Sci Forum 325 (2000): 131-140. doi:10.4028/www.s….net/MSF.325-326.131 2000