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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/32577
Record Status
Checked
Record Id
32577
Title
X-ray reflectivity of an Sb delta-doping layer in silicon.
Contributors
WFJ Slijkerman
,
JM Gay
,
PM Zagwijin
,
JF vanderVeen
,
JE MacDonald
,
AA Williams
,
DJ Gravesteijn
,
GFA Vandewalle
Abstract
Organisation
SRS
,
9.4
,
SERC
Keywords
Funding Information
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
J Appl Phys
68(10) (1990): 5105-5108.
doi:10.1063/1.347047
1990
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