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Persistent URL http://purl.org/net/epubs/work/32577
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Record Id 32577
Title X-ray reflectivity of an Sb delta-doping layer in silicon.
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Organisation SRS , 9.4 , SERC
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Language English (EN)
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Journal Article J Appl Phys 68(10) (1990): 5105-5108. doi:10.1063/1.347047 1990