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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/32589138
Record Status
Checked
Record Id
32589138
Title
Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma
Contributors
P Klein
,
F Lockwood Estrin (University of Liverpool)
,
J Hnilica
,
P Vašina
,
JW Bradley (University of Liverpool)
Abstract
To gain more information on the temporal and spatial behaviour of self-organized spoke structures in HiPIMS plasmas, a correlation between the broadband optical image of an individual spoke (taken over 200 ns) and the current it delivers to the target has been made for a range of magnetron operating conditions. As a spoke passes over a set of embedded probes in the niobium cathode target, a distinct modulation in the local current density is observed, (typically up to twice the average value), matching very well the radially integrated optical emission intensities (obtained remotely with an ICCD camera). The dual diagnostic system allows the merging and splitting of a set of spokes to be studied as they rotate. It is observed that in the merger of two spokes, the trailing spoke maintains its velocity while the leading spoke either decreases its velocity or increases its azimuthal length. In the spoke splitting process, the total charge collected by an embedded probe is conserved. A simple phenomenological model is developed that relates the spoke mode number m to the spoke dimensions, spoke velocity and gas atom velocity. The results are discussed in the context of the observations of spoke dynamics made by Hecimovic et al (2015 Plasma Sources Sci. Technol. 24 045005)
Organisation
CI
Keywords
Funding Information
European Regional Development Fund
(CZ.1.05/2.1.00/03.0086);
EPSRC
(EP/H012605/1);
Ministry of Education Youth and Sports of Czech Republic
(LO1411 (NPU I))
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
J Phys D Appl Phys
50, no. 1 (2017): 015209.
doi:10.1088/1361-6463/50/1/015209
2017
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