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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/32591597
Record Status
Checked
Record Id
32591597
Title
Patterning of Aluminium thin film on polyethylene terephthalate by multi-beam picosecond laser
Contributors
Y Jin (University of Liverpool)
,
W Perrie (University of Liverpool)
,
P Harris (Brunel University)
,
O Allegre (University of Liverpool)
,
K Abrams (University of Liverpool)
,
G Dearden (University of Liverpool)
Abstract
High speed patterning of a 30 nm thick Aluminium thin film on a flexible Polyethylene Terephthalate substrate was demonstrated with the aid of Computer Generated Holograms (CGH's) applied to a phase only Spatial Light Modulator. Low fluence picosecond laser pulses minimise thermal damage to the sensitive substrate and thus clean, single and multi-beam, front side thin film removal is achieved with good edge quality. Interestingly, rear side ablation shows significant Al film delamination. Measured front and rear side ablation thresholds were Fth=0.20±0.01 J cm-2 and Fth=0.15±0.01 J cm-2 respectively. With laser repetition rate of 200 kHz and 8 diffractive spots, a film removal rate of R>0.5 cm2 s-1 was demonstrated during patterning with a fixed CGH and 5 W average laser power. The effective laser repetition rate was feff~1.3 MHz. The application of 30 stored CGH's switching up to 10 Hz was also synchronised with motion control, allowing dynamic large area multi-beam patterning which however, slows micro-fabrication.
Organisation
CI
Keywords
Funding Information
North West Science Fund
(N0003200);
TSB
, PARALASE (TP11/LLd/6/1/AF063B);
ERDF Capital
, KE-LAS (X01436PR)
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
Opt Lasers Eng
74 (2015): 67-74.
doi:10.1016/j.optlaseng.2015.04.006
2015
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