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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/32637382
Record Status
Checked
Record Id
32637382
Title
UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist
Contributors
A Malekabadi (Lancaster University)
,
C Paoloni (Lancaster University)
Abstract
Organisation
CI
Keywords
Funding Information
EPSRC
(EPSRC EP/L026597/1)
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
Journal of Micromechanics and Microengineering 26, no. 9 (2016): 095010.
doi:10.1088/0960-1317/26/9/095010
2016
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