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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/41201795
Record Status
Checked
Record Id
41201795
Title
Calibration correction of ultra low energy SIMS profiles based on MEIS analyses for arsenic shallow implants in silicon
Contributors
E Demenev
,
D Giubertoni
,
J van den Berg
,
M Reading
,
M Bersani
Abstract
Organisation
CI
Keywords
Funding Information
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Language
English (EN)
Type
Details
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Year
Journal Article
Nucl Instrum Meth B
273 (2012): 192-194.
doi:10.1016/j.nimb.2011.07.073
2012
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