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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/45428649
Record Status
Checked
Record Id
45428649
Title
Simulation of sputtering from an isolated conductor surrounded by a dielectric during plasma etching
Contributors
V Tarakanov
,
E Shustin
,
K Ronald
Abstract
Organisation
CI
Keywords
Funding Information
RFBR
(14-08-00143);
NRNU MEPhI
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
Vacuum
165 (2019): 262-265.
doi:10.1016/j.vacuum.2019.04.021
2019
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