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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/50106
Record Status
Checked
Record Id
50106
Title
Growth of HfO2 by liquid injection MOCVD and ALD using new Hafnium-Cyclopentadienyl precursors
Contributors
R O'Kane (Liverpool U.)
,
J Gaskell (Liverpool U.)
,
AC Jones (Liverpool U.)
,
PR Chalker (Liverpool U.)
,
K Black (Liverpool U.)
,
M Werner (Liverpool U.)
,
P Taechakumput (Liverpool U.)
,
S Taylor (Liverpool U.)
,
PN Heys (Liverpool U.)
,
R Odedr (Liverpool U.)
Abstract
Organisation
SRS
,
MEIS
,
STFC
Keywords
Materials
Funding Information
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
Chemical Vapor Deposition 12, no. 11 (2007): 609-617.
doi:10.1002/cvde.200706589
2007
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