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Persistent URL http://purl.org/net/epubs/work/50409429
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Record Id 50409429
Title Design and development of a compact ion implanter and plasma diagnosis facility based on a 2.45 GHz microwave ion source
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Organisation CI
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Funding Information SERB (SERB/EMR/000/722)
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Language English (EN)
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Journal Article Rev Sci Instrum 92, no. 5 (2021): 053306. doi:10.1063/5.0029629 2021