ePubs

The open archive for STFC research publications

Full Record Details

Persistent URL	http://purl.org/net/epubs/work/52092
Record Status	Checked
Record Id	52092
Title	Scaling potential and MOSFET integration of thermally stable Gd silicate dielectrics
Contributors	HDB Gottlob (AMICA Aachen), M Schmidt (AMICA Aachen), A Stefani (AMICA Aachen), MC Lemme (AMICA Aachen), H Kurz (AMICA Aachen), I Z Mitrovic (Liverpool U.), WM Davey (Liverpool U.), S Hall (Liverpool U.), M Werner (Liverpool U.), PR Chalker (Liverpool U.), K Cherkaoui (Cork U.), PK Hurley (Cork U.), J Piscator (Göteborg U.), O Engström (Göteborg U.), SB Newcomb (Glebe Scientific, Newport, Ireland)
Abstract
Organisation	MEIS , STFC
Keywords	Materials
Funding Information
Related Research Object(s):
Licence Information:
Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	Microelectron Eng 86 (2009): 1642-1645.	doi:10.1016/j.mee.2009.03.084		2009