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Persistent URL http://purl.org/net/epubs/work/52691
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Record Id 52691
Title Influences of embossing technology on Pb(Zr-0.3,Ti-0.7)O-3 ferroelectric thin film
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Organisation CMF , EID , STFC
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Language English (EN)
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Journal Article Microelectron Eng 87, no. 5-8 (2010): 869-871. doi:10.1016/j.mee.2009.12.049 2010