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Persistent URL	http://purl.org/net/epubs/work/53213
Record Status	Checked
Record Id	53213
Title	High Resolution Depth Profile Analysis of Ultra Thin High-κ Hf Based Films Using MEIS Compared with XTEM, XRF, SE and XPS
Contributors	JA van den Berg (Salford U.), MA Reading (Salford U.), A Parisini (Bologna U.), M Kolbe (Berlin U.), B Beckhoff (Berlin U.), S Ladas (Patras U.), M Fried (Patras U.), P Petrik (Budapest U.), P Bailey (STFC Daresbury Lab.), T Noakes (STFC Daresbury Lab.), T Conrad (IMEC), S de Gendt (IMEC)
Abstract
Organisation	SRS , MEIS , STFC
Keywords	Materials
Funding Information
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Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	ECS Transactions 25, no. 3 (2010): 349-361.	doi:10.1149/1.3204425		2010