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Persistent URL	http://purl.org/net/epubs/work/53584
Record Status	Checked
Record Id	53584
Title	Si Ultra Shallow Junctions Dopant Profiling with ADF-STEM
Contributors	A Parisini (Bologna U.), D Giubertoni (Bologna U.), M Bersani (Bologna U.), V Morandi (Bologna U.), PG Merli (Bologna U.), JA van den Berg (Salford U.)
Abstract
Organisation	SRS , MEIS , STFC
Keywords	Materials
Funding Information
Related Research Object(s):
Licence Information:
Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	Mater. Res. Soc. Symp. Proc. 1026E (2007): 1026-C09-04. Is in proceedings of: Mater. Res. Soc. Symp. Proc. Fall 2007.			2007