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Persistent URL	http://purl.org/net/epubs/work/53598
Record Status	Checked
Record Id	53598
Title	Characterization of an ultrashallow junction structure using angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering
Contributors	G Saheli (Salford U.), AG Conti (Salford U.), Y Uritsky (Salford U.), MA Foad (Salford U.), CR Brundle (Salford U.), P Mack (Salford U.), D Kouzminov (Salford U.), MJ Werner (Salford U.), JA van den Berg (Salford U.)
Abstract
Organisation	MEIS , STFC
Keywords	Materials
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Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	J Vac Sci Technol B 26, no. 1 (2007): 298-304.	doi:10.1116/1.2834689		2007