ePubs

The open archive for STFC research publications

Full Record Details

Persistent URL http://purl.org/net/epubs/work/53599
Record Status Checked
Record Id 53599
Title Comparison of electrical measurements with structural analysis of thin High-k Hafnium-based films
Contributors
Abstract
Organisation MEIS , STFC
Keywords Materials
Funding Information
Related Research Object(s):
Licence Information:
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article ECS Transactions 25, no. 3 (2009): 363-372. doi:10.1149/1.3204426 2009