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Persistent URL	http://purl.org/net/epubs/work/55817
Record Status	Checked
Record Id	55817
Title	Electrical and structural properties of ultrathin SiON films prepared by plasma nitridation
Contributors	E Hourdakis (Salford U.), AG Nassioploulu (Salford U.), A Parsini (Salford U.), MA Reading (Salford U.), JA van den Berg (Salford U.), L Sygellou (Salford U.), S Ladas (Salford U.), P Petrik (Salford U.), A Nutsch (Salford U.), M Wolf (Salford U.), G Roeder (Salford U.)
Abstract
Organisation	MEIS , STFC
Keywords	Materials
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Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	J Vac Sci Technol B 29, no. 2 (2011): 022011.	doi:10.1116/1.3556938		2011

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