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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/56519
Record Status
Checked
Record Id
56519
Title
SrHfO(3) Films Grown on Si(100) by Plasma-Assisted Atomic Layer Deposition
Contributors
K Black (Liverpool U.)
,
M Werner (Liverpool U.)
,
R Rowlands-Jones (Liverpool U.)
,
PR Chalker (Liverpool U.)
,
MJ Rosseinsky (Liverpool U.)
Abstract
Organisation
MEIS
,
STFC
Keywords
Materials
Funding Information
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Language
English (EN)
Type
Details
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Year
Journal Article
Chem Mater
23, no. 10 (2011): 2518-2520.
doi:10.1021/cm200315u
2011
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