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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/65799
Record Status
Checked
Record Id
65799
Title
Calibration correction of ultra low energy SIMS profiles based on MEIS analysis of shallow arsenic implants in silicon
Contributors
E Demenev (FBK, Trento, Italy)
,
D Giubertoni (FBK, Trento, Italy)
,
MA Reading (Salford U.)
,
P Bailey (STFC Daresbury Lab.)
,
TCQ Noakes (STFC Daresbury Lab.)
,
M Bersani (FBK, Trento, Italy)
,
JA van den Berg (Salford U.)
Abstract
Organisation
ASTeC
,
ASTeC-AP
,
CI
,
STFC
Keywords
Funding Information
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Language
English (EN)
Type
Details
URI(s)
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Year
Journal Article
Surface and Interface Analysis 45, no. 1 (2012): 413-416. Is in proceedings of: 18th International Conference on Secondary Ion Mass Spectrometry (SIMS XVIII), Trento, Italy, 18-23 Sep 2011.
doi:10.1002/sia.5136
2012
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