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Persistent URL	http://purl.org/net/epubs/work/66381
Record Status	Checked
Record Id	66381
Title	Medium energy ion scattering for the high depth resolution characterisation of high-k dielectric layers of nanometer thickness
Contributors	JA van den Berg (Huddersfield U., and Salford U.), MA Reading (Salford U.), P Bailey (Huddersfield U.), TCQ Noakes (STFC Daresbury Lab.), C Adelmann (IMEC, Louvain, Belgium), M Popovici (IMEC, Louvain, Belgium), H Tielens (IMEC, Louvain, Belgium), T Conard (IMEC, Louvain, Belgium), S de Gendt (IMEC, Louvain, Belgium), S van Elshocht (Katholieke Univ Leuven, Louvain, Belgium)
Abstract
Organisation	ASTeC , CI , STFC , ASTeC-Ph
Keywords	ASTeC 2013-2014
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Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	Appl Surf Sci 281 (2013): 8-16.	doi:10.1016/j.apsusc.2013.02.003		2013