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Persistent URL http://purl.org/net/epubs/work/16094
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Record Id 16094
Title Use of a random phase plate as a KrF laser beam homogenizer for thin film deposition applications
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Abstract
Organisation CCLRC , CLF , CLF-LSD
Keywords CLF 1998-1999
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Rev Sci Instrum 70 (1999): 2116. doi:10.1063/1.1149723 1999