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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/31545305
Record Status
Checked
Record Id
31545305
Title
Dual wavelength optical metrology using ptychography
Contributors
D Claus
,
DJ Robinson
,
DG Chetwynd
,
Y Shuo
,
WT Pike
,
JJ De J Toriz Garcia
,
JM Rodenburg
Abstract
Organisation
CLF
,
CLF-LFS
,
STFC
Keywords
LLP
Funding Information
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
J Opt
15, no. 3 (2013): 035702.
doi:10.1088/2040-8978/15/3/035702
2013
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