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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/43798
Record Status
Checked
Record Id
43798
Title
Damage formation and annealing studies of low energy ion implants in silicon using medium energy ion scattering
Contributors
M Werner
Abstract
Organisation
CCLRC
,
MEIS
Keywords
Physics
Funding Information
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Thesis
PhD, Salford U., 2006.
2006
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