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Persistent URL	http://purl.org/net/epubs/work/50784
Record Status	Checked
Record Id	50784
Title	Medium energy ion scattering analysis of the evolution and annealing of damage and associated dopant redistribution of ultra shallow implants in Si
Contributors	JA van den Berg (Salford U.), MA Reading (Salford U.), DG Armour (Salford U.), G Carter (Salford U.), PC Zalm (Phillips), P Bailey (STFC Daresbury Lab.), TCQ Noakes (STFC Daresbury Lab.)
Abstract
Organisation	MEIS , STFC
Keywords	Materials
Funding Information
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Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	Radiat Eff Defect S 164, no. 7+8 (2009): 481-491. Presented at: 2nd International Meeting on Recent Developments in the Studyof Radiation Effects in Matters, Fodele, Greece, 7-11 Sep 2008.	doi:10.1080/10420150902949944		2009