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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/51956
Record Status
Checked
Record Id
51956
Title
Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer
Contributors
J Wan
,
S Deng
,
R Yang
,
Z Shu
,
B Lu
,
S Xie
,
Y Chen
,
E Huq
,
R Liu
,
X Qu
Abstract
Organisation
STFC
Keywords
Funding Information
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Language
English (EN)
Type
Details
URI(s)
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Year
Journal Article
Microelectron Eng
86, no. 4-6 (2009): 1238-1242. Is in proceedings of: 34th International Conference on Micro- and Nano-Engineering, Athens, Greece, 15-18 Sep 2008.
doi:10.1016/j.mee.2008.12.022
2009
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