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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/51957
Record Status
Checked
Record Id
51957
Title
Fabrication of enclosed nanofluidic channels by UV cured imprinting and optimized thermal bonding of SU-8 photoresist
Contributors
X Wang
,
L Ge
,
J Lu
,
X Li
,
K Qiu
,
Y Tian
,
S Fu
,
Z Cui
Abstract
Organisation
STFC
Keywords
Funding Information
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Language
English (EN)
Type
Details
URI(s)
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Year
Journal Article
Microelectron Eng
86, no. 4-6 (2009): 1347-1349. Is in proceedings of: 34th International Conference on Micro- and Nano Engineering, Athens, Greece, 15-18 Sep 2008.
doi:10.1016/j.mee.2009.01.070
2009
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