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Persistent URL	http://purl.org/net/epubs/work/55815
Record Status	Checked
Record Id	55815
Title	A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films
Contributors	L Sygellou (Salford U.), S Ladas (Salford U.), MA Reading (Salford U.), JA van den Berg (Salford U.), T Conard (Salford U.), S De Gendt (Salford U.)
Abstract
Organisation	MEIS , STFC
Keywords	Materials
Funding Information
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Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	Surf. Inter. Anal. 42, no. 6-7 (2010): 1057-1060.	doi:10.1002/sia.3251		2010